Toronto Nanofabrication Centre (TNFC)
10 King’s College Road, Sanford Fleming Building, Toronto ON M5S 3G4
Focus Areas
Electron beam lithography; Deep reactive ion etching; Nano silicon etching; Wafer bonding; Photolithography; Sputter deposition, e-beam evaporation, thermal evaporation; Plasma enhanced chemical vapour deposition; Parylene coating; Low pressure chemical vapour deposition of Si3N4; Chemical mechanical polishing; Critical point dryer; Wire bonding; Rapid thermal processing; Thermal oxidation and annealing; 3D microscopy; Wafer dicing; Metal coating; Microfabrication processing; Elliposmetry; Surface profiling; Nanospec measurement of film thickness; KOH anisotropic Si-etching; Four-point probing; Induction coupled plasma – reactive ion etching; Component pick and place; Die-bonding